RWY INCURSION AT ORD; IL; RESULTING IN GAR BY ARRIVING ACFT.

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WE WERE HOLDING SHORT OF TXWY H ON TXWY J AND #3 FOR TKOF. TWR COULD NOT CONTACT AN ACR ON TXWY H HOLDING SHORT OF TXWY J. TWR TOLD US WE WOULD BE NEXT FOR TKOF. CAPT THOUGHT THE TWR INSTRUCTED US TO TAXI INTO POS AND HOLD ON RWY 9L AND CALLED FOR THE BEFORE TKOF CHKS. FO LATER RECALLED TWR INSTRUCTING US TO TAXI UP TO AND HOLD SHORT OF THE RWY; BUT AT THE TIME OF THE OCCURRENCE; SHE SAID NOTHING AND EXECUTED THE BEFORE TKOF CHKS. WE WERE ON THE RWY AWAITING A TKOF CLRNC. TWR NOTIFIED US THAT WE WERE INSTRUCTED TO HOLD SHORT OF THE RWY AND NOT CLRED TO HOLD IN POS. TWR INSTRUCTED US TO EXPEDITE OFF THE RWY VIA TXWY Z; WHICH IS OFF RWY 4L AND NOT RWY 9L; WHICH WE WERE ON. THE CAPT SEARCHED FOR TXWY Z; BUT ONLY SAW TXWYS J AND E; AND THUS WAS UNSURE OF WHERE TWR WANTED US TO GO. OUR ENSUING DELAY OFF OF THE RWY RESULTED IN TWR INSTRUCTING A JET ON FINAL TO GAR. ONCE WE WERE CLR OF THE RWY; WE WERE RESEQUENCED FOR TKOF WITHOUT FURTHER INCIDENT. SUSPECT TWR'S NONSTANDARD USE OF THE WORDS 'TAXI' AND 'HOLD' AS A SOURCE OF CONFUSION; IE; 'TAXI INTO POS AND HOLD' VERSUS 'TAXI UP TO AND HOLD SHORT.' SUPPLEMENTAL INFO FROM ACN 478920: FO COMPLETED ALL THE ITEMS ALLOWED PRIOR TO RECEIVING A TKOF CLRNC. WHEN I LOOKED UP; THE ACFT WAS ALIGNED WITH THE RWY CTRLINE. THEN A CONFUSED SOUNDING CTLR COMMENTED; 'YOU'RE NOT SUPPOSED TO BE ON THE RWY. I TOLD YOU TO SHORT. THERE'S AN ACFT ON FINAL. TURN L ON TXWY Z AND EXPEDITE.' AT THIS POINT; MY CAPT BECAME CONFUSED. THE MOST CONVENIENT L WOULD HAVE BEEN AT TXWY J. TXWY Z WAS ALMOST 1/2 WAY DOWN THE RWY. MY CAPT WAS MUTTERING 'Z; HOW CAN I TURN L ON Z?' I RESPONDED 'JUST TURN L; GET OFF THE RWY.' BY THE TIME WE TURNED L ONTO TXWY E; THE TWR HAD PROMPTED THE APCHING ACFT TO GO AROUND. AFTER A BRIEF DELAY; THE TWR GAVE US INSTRUCTIONS BACK TO THE TOP OF THE RWY. WE TOOK OFF; IN TURN; WITHOUT INCIDENT. I BELIEVE THAT THE NON STANDARD CALL FROM THE TWR 'I GUESS YOU'LL BE NEXT' CONTINUED WITH THE PROMPTS TO 'TAXI' AND 'HOLD' CONFUSED THE CAPT. NEXT; I BELIEVE I BECAME ABSORBED WITH THE BEFORE TKOF CHK AND LOST SITUATIONAL AWARENESS. FINALLY; I BELIEVE THE CTLR WAS DISORIENTED AND GAVE US INSTRUCTIONS TO TAXI CLR OF RWY 4L; NOT RWY 9L. THE 'ERROR CHAIN' OUTLINED ABOVE COULD HAVE BEEN BROKEN EARLIER IF THE CTLR HAD RETRAINED FROM USING NONSTANDARD PHRASEOLOGY; AND ESPECIALLY IF THE CAPT AND I HAD VERBALLY VERIFIED OUR INSTRUCTIONS WITH EACH OTHER.